National Institute of Technology Rourkela

राष्ट्रीय प्रौद्योगिकी संस्थान राउरकेला

ଜାତୀୟ ପ୍ରଯୁକ୍ତି ପ୍ରତିଷ୍ଠାନ ରାଉରକେଲା

An Institute of National Importance

Syllabus

Course Details

Subject {L-T-P / C} : ME6535 : Vacuum Technology { 3-0-0 / 3}

Subject Nature : Theory

Coordinator : Dr. S. Anbarasu

Syllabus

Basic Theory: Gas kinetic theory, pressure, conductance, gas flow regimes, vapour pressure, pumping speed, throughput. Gas surface interactions: physisorption, chemi-sorption, condensation. Vacuum Pumps: Mechanical, diffusion, molecular drag, turbo molecular, cryopumps, ion pumps - general working principles, operating regimes. Vacuum Instrumentation: Vacuum gauges, gas regulators, flow meters, residual gas analyzers, interpretation of data. Design Concepts: Materials, chambers, components, joins, seals, valves. Overall system design and integration. Problem Solving: Leak detection and detectors, gas signatures. Vacuum Applications: Freeze drying, packaging, vacuum coating, microelectronics, particle accelerators, distillation, metallurgical processes, television and X-ray tubes, cryogenic insulation, space simulation.

Course Objectives

  • To understand that what is vacuum technology and why is it required.
  • To gain the knowledge of the gas kinetic theory in vacuum pressure.
  • To gain the knowledge on production and measurement of vacuum at different vacuum levels
  • This course will provide a wide knowledge on the different vacuum applications and its importance.

Course Outcomes

CO1: Knowledge will be gained on the subject matter related to vacuum <br />CO2: Able to apply the theory of gases in low pressure and their influences. <br />CO3: Recognize the various vacuum pumps and their operation at different vacuum levels. <br />CO4: Able to use the different measuring instruments at low pressures. <br />CO5: Knowledge will be enhanced to implement the concept for product development.

Essential Reading

  • 1. V.V. Rao, T.B. Ghosh, K.L. Chopra,, Vacuum Science and Technology, Allied Publishers Ltd., New Delhi
  • A. Roth, Vacuum Technology, North Holland Publishing Company, Amsterdam

Supplementary Reading

  • 1. M. H. Hablanian, H. H. Hablanian, High-vacuum Technology: A Practical Guide, 2nd Edition, CRC Press, 1997
  • A.D. Tripathi A. Gupta Ac, Ultra High Vacuum Techniques, Allied Publishers Private Limited, 2002.