Course Details
Subject {L-T-P / C} : EC6313 : Microsystems-Materials, Processes and Devices { 3-0-0 / 3}
Subject Nature : Theory
Coordinator : Dr. Sudip Kundu
Syllabus
Module 1: Introduction to Microsystems and its applications: Evolution of microelectronics MEMS materials and their properties: Silicon, GaAs, Quartz, Polymers, Smart materials and their mechanical, electrical properties, thin films for micro and nano technologies, Wafer preparation Scaling Laws.
Module 2: Micromachining Technology: MEMS fabrication process: Diffusion, Deposition: Oxidation, Evaporation, Sputtering, CVD Lithography: fundamentals, photoresists, lithography processes, Types: Optical, Electron-beam, focused ion beam, X-ray, LIGA process Etching: bulk and surface micro-machining isotropic and anisotropic, wet and dry etching, reactive ion etching and deep reactive ion etching. Wire bonding, packaging and testing- micro-assembly, reliability studies.
Module 3: Transduction mechanism for MEMS devices: Electrostatic, thermal, magnetic etc. Micro Sensors: Thermal sensors, Radiation sensors, Mechanical sensors, Inertial sensors.
Module 4: Modern applications of MEMS: Energy harvesting and Biomedical applications, BioMEMS and Biosensors.
Course Objectives
- To develop an ability, enthusiasm critical thinking in micro-engineering process, materials, and design issues.
- To develop the fundamental concepts of MEMS technology & their applications in different areas.
- To study various sensing and transduction techniques.
- To develop an ability and understanding of micro-scale physics for use in designing MEMS devices.
Course Outcomes
After the completion of this course, students will be able to: <br /> <br />CO1: understand knowledge on fundamental principles and concepts of MEMS technology. <br />CO2: describe the various fabrication techniques in MEMS technology using silicon, polymer, metal and other materials. <br />CO3: apply the knowledge of sensing and transduction mechanisms to design different MEMS devices. <br />CO4: evaluate and judge the performance of the different MEMS devices. <br />CO5: identify the necessity of fabrication steps of the different MEMS devices.
Essential Reading
- G. K. Ananthasuresh, K. J. Vinoy, and S. Gopalakrishnan, Micro and Smart Systems, Wiley
- N. Maluf, An Introduction to Microelectromechanical systems Engineering, Artech House
Supplementary Reading
- M. Madou, Fundamentals of Microfabrication, CRC Press
- J.W Gardner, Micro sensors, MEMS and Smart devices, John Wiley & sons
Journal and Conferences
- Journal of Microelectromechanical Systems
- Microsystem Technologies