Course Details
Subject {L-T-P / C} : EE4407 : MEMS and Nano Electronics { 3-0-0 / 3}
Subject Nature : Theory
Coordinator : Prof. Prasanna Kumar Sahu
Syllabus
Historical Background: Silicon Pressure sensors, Micromachining, Microelectromechanical Systems. Microfabrication and Micromachining : Integrated Circuit Processes, Bulk Micromachining : Isotropic Etching and Anisotropic Etching, Wafer Bonding, High Aspect-Ratio Processes (LIGA) Physical Micro Sensors: Classification of physical sensors, Integrated, Intelligent, or Smart sensors, Sensor Principles and Examples: Thermal sensors, Electrical Sensors, Mechanical Sensors, Chemical and Biosensors. Micro Actuators: Electromagnetic and Thermal microactuation, Mechanical design of microactuators, Microactuator examples, microvalves, micropumps, micromotorsMicroactuatorsystems: Success Stories, Ink-Jet printer heads, Micro-mirror TV Projector etc.
Shrink-down approaches of Transistors: Introduction, CMOS Scaling, The nanoscale MOSFET, FinFETs, Vertical MOSFETs, limits to scaling, system integration limits (interconnect issues etc.), Resonant Tunneling Transistors, Single electron transistors, new storage, optoelectronic, and spintronic devices. Atoms-up approaches: Molecular electronics involving single molecules as electronic devices, transport in molecular structures, molecular systems as alternatives to conventional electronics, molecular interconnects Carbon nanotube electronics, band structure& transport, devices, applications
Course Objectives
- Provide understanding, characterization and <br />measurements of nano structured properties
- Provide ability for design, analysis and simulation of nanostructures and nanodevices
- To provide knowledge about MEMs and Applications
Course Outcomes
1.The students will be exposed to various structure specific synthesis methods, their advantages etc. <br />2.To know about Top-down to Bottom up approach techniques. <br />3.To optimize the methods for specific material applications. <br />4.To familiarize about the importance of quantum dots and their applications.
Essential Reading
- Gregory Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill , 2008
- WaserRanier, Nanoelectronics and Information Technology (Advanced Electronic Materials and Novel Devices), John Wiley & Sons , 2003
Supplementary Reading
- M-H. Bao, Micromechanical Transducers: Pressure sensors, accelerometers, and gyroscopes, Elsevier,New York , 2000
- John H. Davies, The Physics of Low-Dimensional Semiconductors, Cambridge University Press , 1998