Course Details

Subject {L-T-P / C} : EE6149 : Nanoelectronics and MEMS {3-0-0 / 3}
Subject Nature : Theory
Coordinator : Prof. Prasanna Kumar Sahu


Shrink-down approaches of Transistors: Introduction, CMOS Scaling, The nanoscale MOSFET, FinFETs, Vertical MOSFETs, limits to scaling, system integration limits (interconnect issues etc.), Resonant Tunneling Transistors, Single electron transistors, new storage, optoelectronic, and spintronic devices. Atoms-up approaches: Molecular electronics involving single molecules as electronic devices, transport in molecular structures, molecular systems as alternatives to conventional electronics, molecular interconnects Carbon nanotube electronics, band structure & transport, devices, applications.
Historical Background: Silicon Pressure sensors, Micromachining, Microelectromechanical Systems. Microfabrication and Micromachining : Integrated Circuit Processes, Bulk Micromachining : Isotropic Etching and Anisotropic Etching, Wafer Bonding, High Aspect-Ratio Processes (LIGA) Physical Micro Sensors: Classification of physical sensors, Integrated, Intelligent, or Smart sensors, Sensor Principles and Examples: Thermal sensors, Electrical Sensors, Mechanical Sensors, Chemical and Biosensors. Micro Actuators: Electromagnetic and Thermal microactuation, Mechanical design of microactuators, Microactuator examples, microvalves, micropumps, micromotors Microactuator systems: Success Stories, Ink-Jet printer heads, Micro-mirror TV Projector etc.

Course Objectives

  1. Students earn the basic understanding of nano
    electronics and followed the advanced understanding of the nano-micro fabrication
  2. provides advanced level of understanding to the device electronics for integrated circuits, a foundation
    for the device fabrication and various application in the field of sensors technology,optoelectronics, communication and nanotechnology etc.
  3. Learning of design of MEMS transducers and to explore design
    tradeoffs, circuit/system issues, device performance, and manufacturing of microsystem

Course Outcomes

o Students will understand the divers electronic device fabrication.
o Students will have in-depth technical knowledge in one or more areas of specialization.
o Students will have practical understanding of the major engineering concepts and
demonstrate application of their theoretical knowledge of the concepts and help to get
the academic and industrial jobs.
o Students will be able to interact scientifically with industry both within and outside of a
classroom setting.
o Students will develop an appreciation of continuing educational and professional
o Students will appreciate their role as engineers in society.

Essential Reading

  1. Waser Ranier, Nanoelectronics and Information Technology Advanced Electronic Materials and Novel Devices, John Wiley & Sons , 2014
  2. John H. Davies, The Physics of Low-Dimensional Semiconductors, Cambridge University Press , 2012

Supplementary Reading

  1. Marc Madou, Fundamentals of Microfabrication, CRC Press , 1997
  2. M-H. Bao, Micromechanical Transducers: Pressure sensors, accelerometers, and gyroscopes, Elsevier, New York , 2000