Course Details

Subject {L-T-P / C} : EE4407 : MEMS and Nano Electronics {3-0-0 / 3}
Subject Nature : Theory
Coordinator : Prof. Prasanna Kumar Sahu


Historical Background: Silicon Pressure sensors, Micromachining, Microelectromechanical Systems. Microfabrication and Micromachining : Integrated Circuit Processes, Bulk Micromachining : Isotropic Etching and Anisotropic Etching, Wafer Bonding, High Aspect-Ratio Processes (LIGA) Physical Micro Sensors: Classification of physical sensors, Integrated, Intelligent, or Smart sensors, Sensor Principles and Examples: Thermal sensors, Electrical Sensors, Mechanical Sensors, Chemical and Biosensors. Micro Actuators: Electromagnetic and Thermal microactuation, Mechanical design of microactuators, Microactuator examples, microvalves, micropumps, micromotorsMicroactuatorsystems: Success Stories, Ink-Jet printer heads, Micro-mirror TV Projector etc.
Shrink-down approaches of Transistors: Introduction, CMOS Scaling, The nanoscale MOSFET, FinFETs, Vertical MOSFETs, limits to scaling, system integration limits (interconnect issues etc.), Resonant Tunneling Transistors, Single electron transistors, new storage, optoelectronic, and spintronic devices. Atoms-up approaches: Molecular electronics involving single molecules as electronic devices, transport in molecular structures, molecular systems as alternatives to conventional electronics, molecular interconnects Carbon nanotube electronics, band structure& transport, devices, applications

Course Objectives

  1. Provide understanding, characterization and
    measurements of nano structured properties
  2. Provide ability for design, analysis and simulation of nanostructures and nanodevices
  3. To provide knowledge about MEMs and Applications

Course Outcomes

1.The students will be exposed to various structure specific synthesis methods, their advantages etc.
2.To know about Top-down to Bottom up approach techniques.
3.To optimize the methods for specific material applications.
4.To familiarize about the importance of quantum dots and their applications.

Essential Reading

  1. Gregory Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill , 2008
  2. WaserRanier, Nanoelectronics and Information Technology (Advanced Electronic Materials and Novel Devices), John Wiley & Sons , 2003

Supplementary Reading

  1. M-H. Bao, Micromechanical Transducers: Pressure sensors, accelerometers, and gyroscopes, Elsevier,New York , 2000
  2. John H. Davies, The Physics of Low-Dimensional Semiconductors, Cambridge University Press , 1998